Vacuum System
- In-Line Sputter System
In-Line Sputter System
In-Line Sputter System Detail
- - Displacement speed(60Hz) :
- - Ultimate Pressure :
This vacuum system uses vacuum coating, Sputtering and plating, mainly, it has evaporated coating on superficial glass or plastic(acrylamide) from evaporation and heating separation of the metal or oxidizing metal. It uses opque mirror, semitransparent mirror, Ar coating, such as mobile phone window, video display window, various electronic products component (thin film functional coating as non-reflection, nonconductor, electromagnetic waves interception)
- 1) Better vacuum pressure and shortened exhaustion time
For better quality control, We made High vacuum condition from early process with Turbo pump. In process work, we made much shortened exhaustion time with turbo pump 2 set in process and also unloading process are same as early process. Because it can make better quality when whole vacuum condition are similar to other process condition are ideal condition.
2) Simplicity
Adopted much smaller component and parts are reducing share.
Easy to control the date at the touch screen.
3) It can control at frontal panel through Controller of Evaporated coating or sputter Specially, it can control DC power supply and Evaporated coating or sputter system `s starting , finishing and all process do automatically through PLC.
4) Easy maintenance and Convenient service from standardization and entering into mass production. it will be able to adopt from in the rotary terminal and our standard parts according to your objection freely.
Overview and simple connected electric wiring is prevent miss connected wiring also easy to find problems and connection
5) Safty device.
When the water suppling stopped or rises temperature of diffusion pump, we designed to lockout the heater’s electrical power and it has alarm sound.
When the power failure, All valves of exhaustion part will shut, then Leak Valve of Oil Rotary vacuum pump are opened automatically.
At PLC, We put few second delays because It should be confirm a condition of the time that is valve opening and shutting
